平面光波电路

PLC Devices Fabricated on Flexible Plastic Substrate by Roll-to-Roll Imprint Lithography

ty10086 提交于 周四, 08/26/2021 - 12:51
PLC Devices Fabricated on Flexible Plastic Substrate by Roll-to-Roll Imprint LithographyPlanar lightwave circuit;Polymeric roll mold;R2R process;Roll-to-Roll imprint lithography;Optical interconnection;Demand for a low-cost, high-throughput, and high-resolution patterning method for fabricating devices continues to increase. The roll-to-roll (R2R) imprint lithography technique has received a great deal of attention as a means of fabricating next-generation devices.