聚合物笔阵列软光刻

Micro Patterning Using Active Polymer Pen Array

ty10086 提交于 周四, 08/26/2021 - 12:50
Micro Patterning Using Active Polymer Pen ArrayPolymer pen array soft lithography;We design, develope and test a parallel active polymer pen lithography (PPL) device, which consists of individually addressable elastomeric probe tips. The PPL array chip is fabricated using soft lithography method with polydimethylsiloxane (PDMS) material. Individual probe can be pneumatically actuated via a computer controlled interface. We demonstrate parallel writing with 16 individually addressed pens, with each pen producing a different pattern in the same run.