A study on the fabrication of polymer-coated SAW sensors and their sensing properties for some toxic chemical compounds
A study on the fabrication of polymer-coated SAW sensors and their sensing properties for some toxic chemical compoundsSAW sensor;toxic chemical compounds;Polymer-coated film SAW sensors have been fabricated and their sensing properties for toxic chemicals have been extensively investigated. Four types of the toxic chemical compounds of hydrogen cyanide(AC), carbonyl dichloride(CG), pinacolyl methylfluorophosphonate(GD), 2,2'-dichlorodiethylthio ether(HD) were used as target gases.