用微接触印刷技术在聚合物基片上形成TiO < sub > 2 < / sub >的微结构SiO < sub > x < / sub > / COP印章。

Microcontact printing (μCP) techniques have sparked a surge of interests in microfabrication since they help produce arrays on a wide range of target substrates in facile and efficient manners. Polydimethylsiloxane (PDMS) as a well-established material for stamps has constraints resulted from its hydrophobicity and softness, and the replication of PDMS stamps usually requires rigid masters or processes using photoresist. Herein, a novel μCP stamp based on cyclo-olefin polymer (COP) is produced through vacuum ultraviolet (VUV) lithography. 2,4,6,8-tetramethylcyclotetrasiloxane (TMCTS) is selectively deposited at the affinity-patterns on COP surface, and these patterned siloxane films are converted into SiO\u003csub\u003ex\u003c/sub\u003e meanwhile protecting the COP beneath them from the VUV photo-etching. By this means, a patterned relief is fabricated on the COP plates, resulting in a hydrophilic SiO\u003csub\u003ex\u003c/sub\u003e/COP μCP stamp with punch heights of ~180 nm. The novelty arises from the simplicity of the master- and photoresist-free micro-structuring, and the higher stiffness of SiO\u003csub\u003ex\u003c/sub\u003e/COP stamps prevents the deformation during pressing. Finally, an example μCP is given to transfer titania precursor gel and produce TiO\u003csub\u003e2\u003c/sub\u003e micropatterns on flexible polymer substrates. The SiO\u003csub\u003ex\u003c/sub\u003e/COP stamps and the μCP of TiO\u003csub\u003e2\u003c/sub\u003e provide simple and cost-effective patterning techniques, which should contribute to the future design and creation of flexible devices.