一种通过在微柱阵列上悬挂蛛网状结构实现的高性能柔性压力传感器。

Recent years have seen a rapid development of electronic skin for wearable devices, autonomous robotics, and human-machine interaction. As a result, the demand for flexible pressure sensors as the critical sensing element in electronic skin is also increasing. These sensors need to feature high sensitivity, short response time, low detection limit, and so on. In this paper, inspired from the cobweb in nature, we propose a piezoresistive pressure sensor by forming a cobweb-like network made of a zinc octaethylphorphyrin (ZnOEP)/carbon nanotube (CNT) hybrid on an array of polydimethylsiloxane (PDMS) microposts. The hybrid material exhibits excellent adhesion to PDMS, benefitting from ZnOEP's low Young's modulus and the nonpolar bonding between ZnOEP and PDMS such that no delamination and resistance variation are found after thousands of cycles of bending and twisting. With the overhanging morphology of the ZnOEP/CNT network on the micropost array, we realized a pressure sensor with an ultrahigh sensitivity of 39.4 kPa\u003csup\u003e-1\u003c/sup\u003e, a super-fast response time of 3 ms, a low detection limit of 10 Pa, and a reproducible response without degradation after 5000 cycles of pressure loading/unloading. The sensor can be employed for a variety of applications, including wrist pulse measurement, sound level detection, mechanical vibration monitoring, etc., proving its great potential for use in electronic skin systems.